US3567453A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Light sensitive compositions for photoresists and lithography
Assignee: Eastman Kodak Co
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Filing: 1967-12-26
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Granted: 1971-03-02
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Expires: 1987-12-26
Abstract
Abstract A RADIATION SENSITIVE COMPOUND COMPRISES A TETRASUBSTITUTED BORATE ANION AND AN ORGANIC CATION CONTAINING AN ATOM SELECTED FROM THE GROUP CONSISTING OF NITROGEN, ARSENIC, TIN, ANTIMONY, SULFUR, IODINE, PHOSPHORUS, OXYGEN, TITANIUM, PALLADIUM, CHROMIUM AND COBALT. THESE COMPOUNDS CAN BE SPECTRALLY SENSITIZED AND CAN BE USED IN PHOTORESISTS AND FOR LITHOGRAPHY.
Inventors
- 👤 Douglas G Borden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0042; B; B41; B41M; B41M5/00; B41M5/26; B41M5/30; C; C07; C07F; C07F5/00; C07F5/02; C07F5/027; C07F9/00; C07F9/02; C07F9/28; C07F9/54; C07F9/66; C07F9/70; C07F9/74; C09; C09B; C09B44/00; C09B44/10; C09B44/12; C09B44/126; G03C; G03C1/00; G03C1/52; G03C1/54; G03C1/72; G03C1/73; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/127; Y10S522/00; Y10S522/904
Claims Analysis
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-03-01 | 1974-08-31 | 1975-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-03-01 | 1978-08-31 | 1979-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-03-01 | 1982-08-31 | 1983-03-02 | $7700.00 | Window Closed / Lapsed |