US3535137A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating etch resistant masks
Assignee: International Business Machines Corp
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Filing: 1967-01-13
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Granted: 1970-10-20
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Expires: 1987-01-13
Abstract
No abstract record available.
Inventors
- 👤 Ivan Haller
- 👤 Michael Hatzakis
- 👤 Rangaswamy Srinivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:06
CPC Classifications
H; H10; H10P; H10P95/00; G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; H10W; H10W74/00; H10W74/40; H10W74/47
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-10-19 | 1974-04-20 | 1974-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-10-19 | 1978-04-20 | 1978-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-10-19 | 1982-04-20 | 1982-10-20 | $7700.00 | Window Closed / Lapsed |