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US3395090A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of determining crystal grain orientation by comparing sputtered patterns

Assignee: PHYSICS TECHNOLOGY LAB Inc
•
Filing: 1965-05-28
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Granted: 1968-07-30
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Expires: 1985-05-28
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Abstract

No abstract record available.

Inventors

  • 👤 Benjamin B Mcckel

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 03:17
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 114 words
THE METHOD OF DISPLAYING THE CRYSTAL GRAIN ORIENTATION OF THE SURFACE OF A SAMPLE MATERIAL HAVING A CRYSTAL GRAIN ORIENTATION COMPRISING, PLACING SAID MATERIAL IN A SUBSTANTIALLY EVACUATED ENVIRONMENT SO THAT THE SURFACE THEREOF FACES IN A CERTAIN DIRECTION, POSITIONING A DISPLAY PLATE TO SUBSTANTIALLY FACE SAID SURFACE, CONDUCTING RADIO FREQUENCY ENERGY THROUGH SAID ENVIRONMENT AT A POTENTIAL HIGHER THAN SAID SURFACE CAUSING SPUTTERING OF SAID SURFACE AND EJECT ATOMS THEREFROM IN AT LEAST ONE KPATH DETERMINED BY THE CRYSTAL STRUCTURE OF SAID MATERIAL, OBTAINING A DISPLAY OF THE PATH OF ATOMS EJECTED FROM SAID SURFACE AND COMPARING SAID DISPLAY WITH A STANDARD TEST PATTERN TO DETERMINE THE PROPERTIES OF THE CRYSTAL GRAIN ORIENTATION.
Claim 2
Independent Claim 114 words
THE METHOD OF DISPLAYING THE CRYSTAL GRAIN ORIENTATION OF THE SURFACE OF A SAMPLE MATERIAL HAVING A CRYSTAL GRAIN ORIENTATION COMPRISING, PLACING SAID MATERIAL IN A SUBSTANTIALLY EVACUATED ENVIRONMENT SO THAT THE SURFACE THEREOF FACES IN A CERTAIN DIRECTION, POSITIONING A DISPLAY PLATE TO SUBSTANTIALLY FACE SAID SURFACE, CONDUCTING RADIO FREQUENCY ENERGY THROUGH SAID ENVIRONMENT AT A POTENTIAL HIGHER THAN SAID SURFACE CAUSING SPUTTERING OF SAID SURFACE AND EJECT ATOMS THEREFROM IN AT LEAST ONE KPATH DETERMINED BY THE CRYSTAL STRUCTURE OF SAID MATERIAL, OBTAINING A DISPLAY OF THE PATH OF ATOMS EJECTED FROM SAID SURFACE AND COMPARING SAID DISPLAY WITH A STANDARD TEST PATTERN TO DETERMINE THE PROPERTIES OF THE CRYSTAL GRAIN ORIENTATION.

References Cited (Backward Citations)

US3087838A Cited
US3021271A Cited
US3210263A Cited
US3309302A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1971-07-30 1972-01-29 1972-07-30 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1975-07-30 1976-01-29 1976-07-30 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1979-07-30 1980-01-29 1980-07-30 $7700.00 Window Closed / Lapsed

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