US3369991A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for cathode sputtering including a shielded rf electrode
Assignee: International Business Machines Corp
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Filing: 1965-01-28
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Granted: 1968-02-20
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Expires: 1985-01-28
Abstract
No abstract record available.
Inventors
- 👤 Pieter D Davidse
- 👤 Leon I Maissel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:19
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/34; C23C14/35; H01B; H01B3/00; H01B3/02; H10; H10W; H10W74/00; H10W74/40; H10W74/43
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
164 words
AN APPARATUS FOR COATING ARTICLES WITH INSULATING MATERIAL SUPTTERED FROM A DIELECTRIC TARGET, COMPRISING: A LOW-PRESSURE GAS IONIZATION CHAMBER ADAPTED TO CONTAIN THE DIELECTRIC TARGET AND THE ARTICLES TO BE COATED, MEANS FOR APPLYING A HIGH-FREQUENCY ALTERNATING-CURRENT EXCITATION TO THE INTERIOR OF SAID CHAMBER FOR IONIZING THE ENCLOSED GAS AND MAINTAINING A GLOW DISCHARGE THEREIN, SAID EXCITATION MEANS INCLUDING A HIGH-FREQUENCY ELECTRODE ON WHICH THE DIELECTRIC TARGET IS ADAPTED TO BE POSITIONED FOR UNDERGOING BOMBARDMENT BY GAS IONS DURING PERIODS WHEN THE EXPOSED SURFACE OF THE TARGET IS AT A NEGATIVE POTENTIAL WITH RESPECT TO SUCH IONS, SAID ELECTRODE HAVING A PORTION OF ITS SURFACE EXPOSED TO THE GAS IN SAID CHAMBER, AND AN ANTI-SPUTTERING SHIELD FOR SAID ELECTRODE CONSTITUTED AND ARRANGED SO THAT THE DISTANCE SEPARATING SAID SHIELD FROM THE EXPOSED SURFACE OF SAID ELECTRODE IS NOT SUBSTANTIALLY LESS THAN ONE-QUARTER INCH AND NOT SUBSTANTIALLY GREATER THAN THE THICKNESS OF THE CROOKS DARK SPACE IN THE GLOW DISCAHRGE MAINTAINED BY SAID EXCITATION MEANS.
Claim 2
Independent Claim
164 words
AN APPARATUS FOR COATING ARTICLES WITH INSULATING MATERIAL SUPTTERED FROM A DIELECTRIC TARGET, COMPRISING: A LOW-PRESSURE GAS IONIZATION CHAMBER ADAPTED TO CONTAIN THE DIELECTRIC TARGET AND THE ARTICLES TO BE COATED, MEANS FOR APPLYING A HIGH-FREQUENCY ALTERNATING-CURRENT EXCITATION TO THE INTERIOR OF SAID CHAMBER FOR IONIZING THE ENCLOSED GAS AND MAINTAINING A GLOW DISCHARGE THEREIN, SAID EXCITATION MEANS INCLUDING A HIGH-FREQUENCY ELECTRODE ON WHICH THE DIELECTRIC TARGET IS ADAPTED TO BE POSITIONED FOR UNDERGOING BOMBARDMENT BY GAS IONS DURING PERIODS WHEN THE EXPOSED SURFACE OF THE TARGET IS AT A NEGATIVE POTENTIAL WITH RESPECT TO SUCH IONS, SAID ELECTRODE HAVING A PORTION OF ITS SURFACE EXPOSED TO THE GAS IN SAID CHAMBER, AND AN ANTI-SPUTTERING SHIELD FOR SAID ELECTRODE CONSTITUTED AND ARRANGED SO THAT THE DISTANCE SEPARATING SAID SHIELD FROM THE EXPOSED SURFACE OF SAID ELECTRODE IS NOT SUBSTANTIALLY LESS THAN ONE-QUARTER INCH AND NOT SUBSTANTIALLY GREATER THAN THE THICKNESS OF THE CROOKS DARK SPACE IN THE GLOW DISCAHRGE MAINTAINED BY SAID EXCITATION MEANS.
Claim 3
Independent Claim
136 words
AN APPARATUS FOR COATING ARTICLES WITH INSULATING MATERIAL SPUTTERED FROM A DIELECTRIC TARGET, COMPRISING: A LOW-PRESSURE GAS IONIZATION CHAMBER ADAPTED TO CONTAIN THE DIELECTRIC TARGET AND THE ARTICLES TO BE COATED, MEANS FOR APPLYING A RADIO-FREQUENCY EXCITATION TO THE INTERIOR OF SAID CHAMBER FOR IONIZING THE GAS AND MAINTAINING A GLOW DISCHARGE THEREIN, SAID EXCITATION MEANS INCLUDING A TUNABLE RADIO-FREQUENCY POWER SOURCE, AND A RADIO-FREQUENCY ELECTRODE ON WHICH THE DIELECTRIC TARGET IS ADAPTED TO BE POSITIONED FOR UNDERGOING BOMBARDMENT BY GAS IONS DURING THOSE PERIODS WHEN THE EXPOSED SURFACE OF THE TARGET IS AT A NEGATIVE POTENTIAL WITH RESPECT TO SUCH IONS, AND A MAGNETIC FIELD-PRODUCING DEVICE FOR APPLYING A MAGNETIC FIELD TO THE IONIZED GAS IN SAID CHAMBER FOR STABILIZING THE RADIO-FREQUENCY GLOW- DISCHARGE THEREIN AND TO FACILITATE THE TUNING OF SAID RADIO-FREQUENCY POWER SOURCE.
Claim 4
Independent Claim
136 words
AN APPARATUS FOR COATING ARTICLES WITH INSULATING MATERIAL SPUTTERED FROM A DIELECTRIC TARGET, COMPRISING: A LOW-PRESSURE GAS IONIZATION CHAMBER ADAPTED TO CONTAIN THE DIELECTRIC TARGET AND THE ARTICLES TO BE COATED, MEANS FOR APPLYING A RADIO-FREQUENCY EXCITATION TO THE INTERIOR OF SAID CHAMBER FOR IONIZING THE GAS AND MAINTAINING A GLOW DISCHARGE THEREIN, SAID EXCITATION MEANS INCLUDING A TUNABLE RADIO-FREQUENCY POWER SOURCE, AND A RADIO-FREQUENCY ELECTRODE ON WHICH THE DIELECTRIC TARGET IS ADAPTED TO BE POSITIONED FOR UNDERGOING BOMBARDMENT BY GAS IONS DURING THOSE PERIODS WHEN THE EXPOSED SURFACE OF THE TARGET IS AT A NEGATIVE POTENTIAL WITH RESPECT TO SUCH IONS, AND A MAGNETIC FIELD-PRODUCING DEVICE FOR APPLYING A MAGNETIC FIELD TO THE IONIZED GAS IN SAID CHAMBER FOR STABILIZING THE RADIO-FREQUENCY GLOW- DISCHARGE THEREIN AND TO FACILITATE THE TUNING OF SAID RADIO-FREQUENCY POWER SOURCE.
References Cited (Backward Citations)
US3325392A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-02-19 | 1971-08-21 | 1972-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-02-19 | 1975-08-21 | 1976-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-02-19 | 1979-08-21 | 1980-02-20 | $7700.00 | Window Closed / Lapsed |