US3369990A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency
Assignee: International Business Machines Corp
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Filing: 1964-12-31
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Granted: 1968-02-20
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Expires: 1984-12-31
Abstract
No abstract record available.
Inventors
- 👤 Robert L Hallen
- 👤 Robert M Valletta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 17:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3435; C23C14/345; C23C14/3471; C23C14/35; C23F; C23F4/00; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
114 words
AN APPARATUS FOR THE DEPOSITION OF THIN FILMS ON A SUBSTRATE IN A SPACE HAVING A REDUCED PRESSURE UPON THE ESTABLISHMENT OF A GLOW DISCHARGE IN A REGION BETWEEN A SPUTTERING CATHODE AND SPUTTERING ANODE RESULTING FROM IONIC BOMBARDMENT OF A LAYER OF MATERIAL PLACED ON THE CATHODE, THE IMPROVEMENT COMPRISING: AN IONIZING MEANS POSITIONED ADJACENT SAID REGION AND INCLUDING A THERMINOIC CATHODE, AN ELECTRON COLLECTOR POSITIONED ADJACENT SAID THERMIONIC CATHODE, AND POSITIVELY BIASED WITH RESPECT THERETO TO ESTABLISH AN ELECTRON STREAM BETWEEN SAID THERMIONIC CATHODE AND SAID COLLECTOR, A GAS SUPPLY CONDUIT IN SAID SPACE HAVING AN ORIFICE DIRECTED TOWARD SAID REGION TO CONTINUOUSLY SUPPY AN IONIZABLE GAS GENERALLY TRANSVERSELY THROUGH SAID STREAM.
Claim 2
Independent Claim
114 words
AN APPARATUS FOR THE DEPOSITION OF THIN FILMS ON A SUBSTRATE IN A SPACE HAVING A REDUCED PRESSURE UPON THE ESTABLISHMENT OF A GLOW DISCHARGE IN A REGION BETWEEN A SPUTTERING CATHODE AND SPUTTERING ANODE RESULTING FROM IONIC BOMBARDMENT OF A LAYER OF MATERIAL PLACED ON THE CATHODE, THE IMPROVEMENT COMPRISING: AN IONIZING MEANS POSITIONED ADJACENT SAID REGION AND INCLUDING A THERMINOIC CATHODE, AN ELECTRON COLLECTOR POSITIONED ADJACENT SAID THERMIONIC CATHODE, AND POSITIVELY BIASED WITH RESPECT THERETO TO ESTABLISH AN ELECTRON STREAM BETWEEN SAID THERMIONIC CATHODE AND SAID COLLECTOR, A GAS SUPPLY CONDUIT IN SAID SPACE HAVING AN ORIFICE DIRECTED TOWARD SAID REGION TO CONTINUOUSLY SUPPY AN IONIZABLE GAS GENERALLY TRANSVERSELY THROUGH SAID STREAM.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-02-19 | 1971-08-21 | 1972-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-02-19 | 1975-08-21 | 1976-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-02-19 | 1979-08-21 | 1980-02-20 | $7700.00 | Window Closed / Lapsed |