US3364084A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of epitaxial films
Assignee: Monsanto Co
•
Filing: 1961-05-29
•
Granted: 1968-01-16
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Expires: 1981-05-29
Abstract
No abstract record available.
Inventors
- 👤 Robert A Ruehrwein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 08:21
CPC Classifications
H; H10; H10D; H10D99/00; C; C01; C01B; C01B25/00; C01B25/06; C01B25/08; C01B25/088; C01G; C01G31/00; C22; C22C; C22C1/00; C22C1/007; H10F; H10F99/00; H10P; H10P10/00; H10P10/12; H10P14/00; H10P14/20; H10P14/24; H10P14/29; H10P14/2901; H10P14/2907; H10P14/2911; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3418; H10P14/3421; H10P14/3422; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/056; Y10S148/065; Y10S148/067; Y10S148/072; Y10S148/11; Y10S148/119; Y10S148/12; Y10S148/142; Y10S148/15; Y10S252/00; Y10S252/95; Y10S252/951; Y10S438/00; Y10S438/914; Y10S438/925; Y10S438/933; Y10S438/936
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
131 words
PROCESS FOR THE PRODUCTION AND DEPOSITION OF EPITAXIAL FILMS OF COMPOUNDS OF GROUP III-B ELEMENTS HAVING ATOMIC WEIGHTS OF FROM 10 TO 119 AND ELEMENTS SELECTED FROM GROUP V-B HAVING ATOMIC WEIGHTS OF FROM 12 TO 133 AND MIXTURES THEREOF ONTO A SUBSTRATE MATERIAL CRYSTALLOGRAPHICALLY COMPATIBLE WITH SAID FILMS AND SELECTED FROM THE GROUP CONSISTING OF III-V COMPOUNDS, I-VII COMPOUNDS, II-VII COMPOUNDS, GERMANIUM AND SILICON, WHICH COMPRISES COMBINING IN THE VAPOR PHASE AT LEAST ONE VOLATILE COMPOUND OF GROUP III-B ELEMENTS TOGETHER WITH AT LEAST ONE VOLATILE COMPOUND OF GROUP V-B ELEMENTS IN THE PRESENCE OF HYDROGEN, AND CONTACTING THE RESULTING REACTION MIXTURE WITH SAID SUBSTRATE WHEREBY A PURIFIED SINGLE CRYSTAL FORM OF AT LEAST ONE III-V COMPOUND IS DEPOSITED FROM SAID REACTION MIXTURE AS AN EPITAXIAL FILM ON SAID SUBSTRATE.
Claim 2
Dependent Claim
131 words
PROCESS FOR THE PRODUCTION AND DEPOSITION OF EPITAXIAL FILMS OF COMPOUNDS OF GROUP III-B ELEMENTS HAVING ATOMIC WEIGHTS OF FROM 10 TO 119 AND ELEMENTS SELECTED FROM GROUP V-B HAVING ATOMIC WEIGHTS OF FROM 12 TO 133 AND MIXTURES THEREOF ONTO A SUBSTRATE MATERIAL CRYSTALLOGRAPHICALLY COMPATIBLE WITH SAID FILMS AND SELECTED FROM THE GROUP CONSISTING OF III-V COMPOUNDS, I-VII COMPOUNDS, II-VII COMPOUNDS, GERMANIUM AND SILICON, WHICH COMPRISES COMBINING IN THE VAPOR PHASE AT LEAST ONE VOLATILE COMPOUND OF GROUP III-B ELEMENTS TOGETHER WITH AT LEAST ONE VOLATILE COMPOUND OF GROUP V-B ELEMENTS IN THE PRESENCE OF HYDROGEN, AND CONTACTING THE RESULTING REACTION MIXTURE WITH SAID SUBSTRATE WHEREBY A PURIFIED SINGLE CRYSTAL FORM OF AT LEAST ONE III-V COMPOUND IS DEPOSITED FROM SAID REACTION MIXTURE AS AN EPITAXIAL FILM ON SAID SUBSTRATE.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-01-15 | 1971-07-17 | 1972-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-01-15 | 1975-07-17 | 1976-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-01-15 | 1979-07-17 | 1980-01-16 | $7700.00 | Window Closed / Lapsed |