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US3294670A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for processing materials in a controlled atmosphere

Assignee: AT&T Inc
•
Filing: 1963-10-07
•
Granted: 1966-12-27
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Expires: 1983-10-07
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Abstract

No abstract record available.

Inventors

  • 👤 Sidney S Charschan
  • 👤 Westgaard Harald

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 01:31
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 249 words
ONE-ENDED, CONTINUOUS PROCESSING APPARATUS, WHICH COMPRISES: AN ELONGATED, OPEN-ENDED, APERTURED CHANNEL EXTENDING LONGITUDINALLY THROUGH THE APPARATUS, THE CHANNEL DEFINING A PASSAGE THROUGH WHICH MATERIAL TO BE PROCESSED ENTERS THE APPARATUS FROM AMBIENT ATMOSPHERE, PASSED THROUGH THE APPARATUS AND EXITS INTO AMBIENT ATMOSPHERE; A PLURALTY OF INTERCONNECTED, OPEN-ENDED CHAMBERS SUPPORTING THE CHANNEL, INDIVIDUAL CHAMBERS SURROUNDING APERTURED PORTIONS OF THE CHANNEL AND CONTAINING PROCESSING ATMOSPHERES TO WHICH THE MATERIAL IN THE CHANNEL IS EXPOSED THROUGH THE APERTURES THEREIN; MEANS CONNECTED TO THE CHAMBERS FOR MAINTAINING PREDETERMINED PRESSURES IN THE PROCESSING ATMOSPHERES IN THE CHAMBERS; GUIDE MEANS EXTENDING ALONG THE CHANNEL ON THE INSIDE SURFACE THEREOF; A PLURALITY OF IDENTICALLY SHAPED CARRIERS FOR CONVEYING THE MATERIAL THROUGH THE APPARATUS, THE CARRIERS HAVING PORTIONS PROJECTING TRANSVERSELY OUTWARDLY BEYOND THE ENTIRE OUTER PERIPHERIES OF THE MATERIAL CARRIED BY THE CARRIERS, SEGMENTS OF THE PROJECTING PORTIONS OF THE CARRIERS BEING COMPLEMENTARY IN SHAPE TO THE GUIDE MEANS AND COOPERATING THEREWITH TO ALIGN THE CARRIERS AXIALLY AND ACCURATELY POSITION THE CARRIERS IN THE CHANNEL, THE AXIAL ALIGNMENT OF THE CARRIERS AND POSITIONING OF THE CARRIERS ACCURATELY IN THE CHANNEL PROVIDING UNIFORM, RESTRICTED CLEARANCES BETWEEN THE OUTER PERIPHERIES OF THE ENLARGED PORTIONS OF THE CARRIES AND INSIDE SURFACES OF THE CHANNEL SUFFICIENTLY LARGE TO ALLOW THE CARRIES TO MOVE FREELY THROUGH THE CHANNEL AND STILL PROVIDE SUFFICIENT RESISTANCE TO THE FLOW OF FLUIDS TO AND FORM THE CHAMBERS TO PERMIT PREDETERMINED PRESSURES TO BE MAINTAINED IN THE CHAMBERS; AND MEANS FOR MOVING THE CARRIERS THROUGH THE CHANNEL.
Claim 2
Dependent Claim 249 words
ONE-ENDED, CONTINUOUS PROCESSING APPARATUS, WHICH COMPRISES: AN ELONGATED, OPEN-ENDED, APERTURED CHANNEL EXTENDING LONGITUDINALLY THROUGH THE APPARATUS, THE CHANNEL DEFINING A PASSAGE THROUGH WHICH MATERIAL TO BE PROCESSED ENTERS THE APPARATUS FROM AMBIENT ATMOSPHERE, PASSED THROUGH THE APPARATUS AND EXITS INTO AMBIENT ATMOSPHERE; A PLURALTY OF INTERCONNECTED, OPEN-ENDED CHAMBERS SUPPORTING THE CHANNEL, INDIVIDUAL CHAMBERS SURROUNDING APERTURED PORTIONS OF THE CHANNEL AND CONTAINING PROCESSING ATMOSPHERES TO WHICH THE MATERIAL IN THE CHANNEL IS EXPOSED THROUGH THE APERTURES THEREIN; MEANS CONNECTED TO THE CHAMBERS FOR MAINTAINING PREDETERMINED PRESSURES IN THE PROCESSING ATMOSPHERES IN THE CHAMBERS; GUIDE MEANS EXTENDING ALONG THE CHANNEL ON THE INSIDE SURFACE THEREOF; A PLURALITY OF IDENTICALLY SHAPED CARRIERS FOR CONVEYING THE MATERIAL THROUGH THE APPARATUS, THE CARRIERS HAVING PORTIONS PROJECTING TRANSVERSELY OUTWARDLY BEYOND THE ENTIRE OUTER PERIPHERIES OF THE MATERIAL CARRIED BY THE CARRIERS, SEGMENTS OF THE PROJECTING PORTIONS OF THE CARRIERS BEING COMPLEMENTARY IN SHAPE TO THE GUIDE MEANS AND COOPERATING THEREWITH TO ALIGN THE CARRIERS AXIALLY AND ACCURATELY POSITION THE CARRIERS IN THE CHANNEL, THE AXIAL ALIGNMENT OF THE CARRIERS AND POSITIONING OF THE CARRIERS ACCURATELY IN THE CHANNEL PROVIDING UNIFORM, RESTRICTED CLEARANCES BETWEEN THE OUTER PERIPHERIES OF THE ENLARGED PORTIONS OF THE CARRIES AND INSIDE SURFACES OF THE CHANNEL SUFFICIENTLY LARGE TO ALLOW THE CARRIES TO MOVE FREELY THROUGH THE CHANNEL AND STILL PROVIDE SUFFICIENT RESISTANCE TO THE FLOW OF FLUIDS TO AND FORM THE CHAMBERS TO PERMIT PREDETERMINED PRESSURES TO BE MAINTAINED IN THE CHAMBERS; AND MEANS FOR MOVING THE CARRIERS THROUGH THE CHANNEL.
Claim 3
Dependent Claim 174 words
AN OPEN-ENDED, SEMIAUTOMATIC APPARATUS FOR SPUTTERING THIN FILMS OF TANTALUM NITRIDE HAVING DESIRED ELECTRICAL PROPERTIES ON SUCCESSIVE SUBSTRATE SHEETS ON A SERIES OF SUCH SHEETS MOVING CONTINUOUSLY FROM AMBIENT ATMOSPHERE THROUGH VARIOUS PROCESSING CHAMBERS IN THE APPARATUS AND BACK TO AMBIENT ATMOSPHERE, WHICH COMPRISES: A PLURALITY OF OPEN-ENDED, INTERCONNECTED CHAMBERS COMMUNICATING WITH EACH OTHER THROUGH CALIBRATED CLEARANCES, THE CHAMBERS INCLUDING HEATING AN OUTGASSING, SPUTTERING AND COOLING CHAMBERS; MEANS CONNECTED TO THE CHAMBERS FOR EVACUATING THE CHAMBERS TO PROVIDE CONTROLLED, PARTIAL VACUUMS OF PREDETERMINED PRESSURE IN THE CHAMBERS; A HORIZONTAL TUBE EXTENDING LONGITUDINALLY THROUGH THE APPARATUS AND BEING SUPPORTED INTERMEDIATE THE ENDS THEREOF BY WALLS OF THE INDIVIDUAL CHAMBERS, OPPOSITE ENDS OF THE TUBE BEING EXPOSED TO AMBIENT ATMOSPHERE THROUGH WHICH ENDS SUBSTRATE SHEETS TO BE PROCESSED ENTER AND EXIT FROM THE APPARATUS, PORTIONS OF THE TUBE EXTENDING THROUGH THE CHAMBERS BEING PROVIDED WITH APERTURES TO PERMIT CONTROLLED ATMOSPHERES IN THE CHAMBERS TO COMMUNICATE WITH INSIDE PORTION OF THE TUBE EXTENDING THERETHROUGH; GUIDE MEANS FORMED ON THE INNER SURFACE OF THE WALLS OF THE TUBE;
Claim 4
Dependent Claim 174 words
AN OPEN-ENDED, SEMIAUTOMATIC APPARATUS FOR SPUTTERING THIN FILMS OF TANTALUM NITRIDE HAVING DESIRED ELECTRICAL PROPERTIES ON SUCCESSIVE SUBSTRATE SHEETS ON A SERIES OF SUCH SHEETS MOVING CONTINUOUSLY FROM AMBIENT ATMOSPHERE THROUGH VARIOUS PROCESSING CHAMBERS IN THE APPARATUS AND BACK TO AMBIENT ATMOSPHERE, WHICH COMPRISES: A PLURALITY OF OPEN-ENDED, INTERCONNECTED CHAMBERS COMMUNICATING WITH EACH OTHER THROUGH CALIBRATED CLEARANCES, THE CHAMBERS INCLUDING HEATING AN OUTGASSING, SPUTTERING AND COOLING CHAMBERS; MEANS CONNECTED TO THE CHAMBERS FOR EVACUATING THE CHAMBERS TO PROVIDE CONTROLLED, PARTIAL VACUUMS OF PREDETERMINED PRESSURE IN THE CHAMBERS; A HORIZONTAL TUBE EXTENDING LONGITUDINALLY THROUGH THE APPARATUS AND BEING SUPPORTED INTERMEDIATE THE ENDS THEREOF BY WALLS OF THE INDIVIDUAL CHAMBERS, OPPOSITE ENDS OF THE TUBE BEING EXPOSED TO AMBIENT ATMOSPHERE THROUGH WHICH ENDS SUBSTRATE SHEETS TO BE PROCESSED ENTER AND EXIT FROM THE APPARATUS, PORTIONS OF THE TUBE EXTENDING THROUGH THE CHAMBERS BEING PROVIDED WITH APERTURES TO PERMIT CONTROLLED ATMOSPHERES IN THE CHAMBERS TO COMMUNICATE WITH INSIDE PORTION OF THE TUBE EXTENDING THERETHROUGH; GUIDE MEANS FORMED ON THE INNER SURFACE OF THE WALLS OF THE TUBE;

References Cited (Backward Citations)

US3123499A Cited
US2880982A Cited
US3057792A Cited
US2907480A Cited
US3057130A Cited
US3250694A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1969-12-26 1970-06-27 1970-12-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1973-12-26 1974-06-27 1974-12-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1977-12-26 1978-06-27 1978-12-27 $7700.00 Window Closed / Lapsed

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