US3282816A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process of cathode sputtering from a cylindrical cathode
Assignee: International Business Machines Corp
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Filing: 1963-09-16
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Granted: 1966-11-01
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Expires: 1983-09-16
Abstract
No abstract record available.
Inventors
- 👤 Kay Eric
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 05:19
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/35
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
131 words
THE PROCESS OF COATING AN ARTICLE BY SPUTTERING IN A SPUTTERING APPARATUS INCLUDING AN ANODE AND A CATHODE, SAID CATHODE COMPRISING A RIGHT-CIIRCULAR-CYLINDRICAL SURFACE, SAID METHOD COMPRISING THE STEPS OF: ARRANGING SAID ARTICLE SUCH THAT IT IS DISPOSED ALONG THE AXIS OF SAID CYLINDRICAL CATHODE FOR UNIFORM DEPOSITION THEREON, IMPOSING WITHIN SAID APPARATUS A SUITABLE PRESSURE OF IONIZABLE GAS AND A SUITABLE ANOD-CATHODE VOLTAGE POTENTIAL DIFFERENCE TO THEREBY OBTAIN ABNORMAL GLOW DISCHARGE CONDITIONS WITHIN SAID CATHODE, SUCH THAT SAID DISCHARGE IS RADIALLY SYMMETRICAL ABOUT SAID AXIS; AND SUPERPOSING UPON SAID DISCHARGE A MAGNETIC FIELD HAVING A MAJOR COMPONENT PARALLEL TO SAID AXIS AND TRANSVERSE TO SAID DISCHARGE, SAID FIELD BEING RADIALLY SYMMETRIC ABOUT SAID AXIS AND OF SUFFICIENT INTENSITY TO INDUCE ELECTRON SPIRALLING WITHIN SAID DISCHARGE AND YET MAINTAIN SAID DISHCARGE.
Claim 2
Dependent Claim
131 words
THE PROCESS OF COATING AN ARTICLE BY SPUTTERING IN A SPUTTERING APPARATUS INCLUDING AN ANODE AND A CATHODE, SAID CATHODE COMPRISING A RIGHT-CIIRCULAR-CYLINDRICAL SURFACE, SAID METHOD COMPRISING THE STEPS OF: ARRANGING SAID ARTICLE SUCH THAT IT IS DISPOSED ALONG THE AXIS OF SAID CYLINDRICAL CATHODE FOR UNIFORM DEPOSITION THEREON, IMPOSING WITHIN SAID APPARATUS A SUITABLE PRESSURE OF IONIZABLE GAS AND A SUITABLE ANOD-CATHODE VOLTAGE POTENTIAL DIFFERENCE TO THEREBY OBTAIN ABNORMAL GLOW DISCHARGE CONDITIONS WITHIN SAID CATHODE, SUCH THAT SAID DISCHARGE IS RADIALLY SYMMETRICAL ABOUT SAID AXIS; AND SUPERPOSING UPON SAID DISCHARGE A MAGNETIC FIELD HAVING A MAJOR COMPONENT PARALLEL TO SAID AXIS AND TRANSVERSE TO SAID DISCHARGE, SAID FIELD BEING RADIALLY SYMMETRIC ABOUT SAID AXIS AND OF SUFFICIENT INTENSITY TO INDUCE ELECTRON SPIRALLING WITHIN SAID DISCHARGE AND YET MAINTAIN SAID DISHCARGE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-10-31 | 1970-05-02 | 1970-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-10-31 | 1974-05-02 | 1974-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-10-31 | 1978-05-02 | 1978-11-01 | $7700.00 | Window Closed / Lapsed |