Thickness rate monitoring system for depositing dielectric films

Claim 1

A SYSTEM FOR MONITORING THE DEPOSITION OF A DIELECTRIC MATERIAL FROM A SOURCE COMPRISING A SENSOR CAPACITOR POSITIONED ADJACENT TO THE SOURCE TO RECEIVE SAID DEPOSITED MATERIAL, A COAXIAL CABLE HAVING FIRST AND SECOND ENDS WITH SAID FIRST END CONNECTED TO SAID SENSOR CAPACITOR, SAID CABLE HAVING A DISTRIBUTED CAPACITANCE, A FIRST SOURCE OF REFERENCE POTENTIAL, A FIRST ADJUSTABLE IMPEDANCE PATH CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO THE SECOND END OF SAID CABLE, A SECOND ADJUSTABLE IMPEDANCE PATH HAVING A FIRST AND SECOND ENDS WITH SAID FIRST END CONNECTED TO THE SECOND END OF SAID CABLE, A REFERENCE CAPACITOR, A THIRD IMPEDANCE PATH CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO SAID REFERENCE CAPACITOR, A SOURCE OF SWITCHING SIGNALS, A SECOND SOURCE OF REFERENCE POTENTIAL, FIRST SWITCHING MEANS CONNECTED TO SAID SOURCE OF SWITCHING SIGNALS AND BETWEEN SAID COAXIAL CABLE AND SAID SECOND SOURCE OF REFERENCE POTENTIAL, SECOND SWITCHING MEANS CONNECTED TO SAID SOURCE OF SWITCHING SIGNALS AND BETWEEN SAID REFERENCE CAPACITOR AND SAID SECOND SOURCE OF REFERENCE POTENTIAL, FIRST AND SECOND PEAK DETECTING MEANS CONNECTED TO SAID SECOND SOURCE OF REFERENCE POTENTIAL AND RESPECTIVELY TO SAID COAXIAL CABLE AND TO SAID REFERENCE CAPACITOR, A FIRST STORAGE CAPACITOR, DUAL INPUT AMPLIFIER MEANS INCLUDING FIRST CHOPPER MEANS CONNECTED TO SAID FIRST STORAGE CAPACITOR FOR ALTERNATELY CONNECTING SAID FIRST STORAGE CAPACITOR TO SAID FIRST AND SECOND PEAK DETECTING MEANS, SAID AMPLIFIER MEANS INCLUDING SECOND CHOPPER MEANS CONNECTED TO SAID FIRST STORAGE CAPACITOR FOR ALTERNATELY CONNECTING SAID FIRST STORAGE CAPACITOR TO SAID FIRST SOURCE OF REFERENCE POTENTIAL AND TO THE SECOND END OF SAID SECOND IMPEDANCE PATH, A SECOND STORAGE CAPACITOR CONNECTED TO THE SECOND END OF SECOND IMPEDANCE PATH AND TO SAID FIRST SOURCE OF REFERENCE POTENTIAL, AND METER MEANS CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO SAID SECOND STORAGE CAPACITOR FOR RESPONDING TO THE VOLTAGE THEREAT, THE VOLTAGE AT SAID STORAGE CAPACITOR REPRESENTING THE PERCENTAGE CHANGE OF CAPACITANCE OF SAID SENSOR CAPACITOR AND THE DEPOSITED THICKNESS OF SAID DIELECTRIC MATERIAL.

Claim 2

A SYSTEM FOR MONITORING THE DEPOSITION OF A DIELECTRIC MATERIAL FROM A SOURCE COMPRISING A SENSOR CAPACITOR POSITIONED ADJACENT TO THE SOURCE TO RECEIVE SAID DEPOSITED MATERIAL, A COAXIAL CABLE HAVING FIRST AND SECOND ENDS WITH SAID FIRST END CONNECTED TO SAID SENSOR CAPACITOR, SAID CABLE HAVING A DISTRIBUTED CAPACITANCE, A FIRST SOURCE OF REFERENCE POTENTIAL, A FIRST ADJUSTABLE IMPEDANCE PATH CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO THE SECOND END OF SAID CABLE, A SECOND ADJUSTABLE IMPEDANCE PATH HAVING A FIRST AND SECOND ENDS WITH SAID FIRST END CONNECTED TO THE SECOND END OF SAID CABLE, A REFERENCE CAPACITOR, A THIRD IMPEDANCE PATH CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO SAID REFERENCE CAPACITOR, A SOURCE OF SWITCHING SIGNALS, A SECOND SOURCE OF REFERENCE POTENTIAL, FIRST SWITCHING MEANS CONNECTED TO SAID SOURCE OF SWITCHING SIGNALS AND BETWEEN SAID COAXIAL CABLE AND SAID SECOND SOURCE OF REFERENCE POTENTIAL, SECOND SWITCHING MEANS CONNECTED TO SAID SOURCE OF SWITCHING SIGNALS AND BETWEEN SAID REFERENCE CAPACITOR AND SAID SECOND SOURCE OF REFERENCE POTENTIAL, FIRST AND SECOND PEAK DETECTING MEANS CONNECTED TO SAID SECOND SOURCE OF REFERENCE POTENTIAL AND RESPECTIVELY TO SAID COAXIAL CABLE AND TO SAID REFERENCE CAPACITOR, A FIRST STORAGE CAPACITOR, DUAL INPUT AMPLIFIER MEANS INCLUDING FIRST CHOPPER MEANS CONNECTED TO SAID FIRST STORAGE CAPACITOR FOR ALTERNATELY CONNECTING SAID FIRST STORAGE CAPACITOR TO SAID FIRST AND SECOND PEAK DETECTING MEANS, SAID AMPLIFIER MEANS INCLUDING SECOND CHOPPER MEANS CONNECTED TO SAID FIRST STORAGE CAPACITOR FOR ALTERNATELY CONNECTING SAID FIRST STORAGE CAPACITOR TO SAID FIRST SOURCE OF REFERENCE POTENTIAL AND TO THE SECOND END OF SAID SECOND IMPEDANCE PATH, A SECOND STORAGE CAPACITOR CONNECTED TO THE SECOND END OF SECOND IMPEDANCE PATH AND TO SAID FIRST SOURCE OF REFERENCE POTENTIAL, AND METER MEANS CONNECTED FROM SAID FIRST SOURCE OF REFERENCE POTENTIAL TO SAID SECOND STORAGE CAPACITOR FOR RESPONDING TO THE VOLTAGE THEREAT, THE VOLTAGE AT SAID STORAGE CAPACITOR REPRESENTING THE PERCENTAGE CHANGE OF CAPACITANCE OF SAID SENSOR CAPACITOR AND THE DEPOSITED THICKNESS OF SAID DIELECTRIC MATERIAL.