US3192892A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion bombardment cleaning and coating apparatus
Assignee: Unisys Corp
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Filing: 1961-11-24
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Granted: 1965-07-06
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Expires: 1981-11-24
Abstract
No abstract record available.
Inventors
- 👤 Marlin M Hanson
- 👤 Paul E Oberg
- 👤 Robert W Olmen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 05:34
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/36; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; Y; Y10; Y10S; Y10S148/00; Y10S148/045
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
111 words
AN EVACUATED IONIZATION CHAMBER FOR CLEANING A SUBSTRATE AND DEPOSITING A FILM OF METALLIC MATERIAL THEREON AND FOR ALTERING THE CHARACTERISTICS OF SAID FILM COMPRISING A SOURCE OF ELECTRONS DISPOSED WITHIN SAID CHAMBER, A VOLUME-TYPE GRID, A VOLTAGE SOURCE CONNECTED BETWEEN SAID SOURCE OF ELECTRONS AND SAID GRID, SAID VOLTAGE SOURCE ESTABLISHING A VOLTAGE GRADIENT SUFFICIENT TO ATTRACT ELECTRONS INTO THE VOLUME ENCLOSED BY SAID GRID, AN IONIZABLE GASEOUS MATERIAL DISPOSED WITHIN THE CONFINES OF SAID GRID, SAID GASEOUS MATERIAL BEING IONIZED BY SAID ELECTRONS, A TARGET INCLUDING SAID SUBSTRATE MATERIAL, A SOURCE OF TARGET POTENTIAL, SAID TARGET POTENTIAL ESTABLISHING A VOLTAGE GRADIENT SUFFICIENT TO ATTRACT SAID IONS TO SAID TARGET.
Claim 2
Dependent Claim
111 words
AN EVACUATED IONIZATION CHAMBER FOR CLEANING A SUBSTRATE AND DEPOSITING A FILM OF METALLIC MATERIAL THEREON AND FOR ALTERING THE CHARACTERISTICS OF SAID FILM COMPRISING A SOURCE OF ELECTRONS DISPOSED WITHIN SAID CHAMBER, A VOLUME-TYPE GRID, A VOLTAGE SOURCE CONNECTED BETWEEN SAID SOURCE OF ELECTRONS AND SAID GRID, SAID VOLTAGE SOURCE ESTABLISHING A VOLTAGE GRADIENT SUFFICIENT TO ATTRACT ELECTRONS INTO THE VOLUME ENCLOSED BY SAID GRID, AN IONIZABLE GASEOUS MATERIAL DISPOSED WITHIN THE CONFINES OF SAID GRID, SAID GASEOUS MATERIAL BEING IONIZED BY SAID ELECTRONS, A TARGET INCLUDING SAID SUBSTRATE MATERIAL, A SOURCE OF TARGET POTENTIAL, SAID TARGET POTENTIAL ESTABLISHING A VOLTAGE GRADIENT SUFFICIENT TO ATTRACT SAID IONS TO SAID TARGET.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-07-05 | 1969-01-04 | 1969-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-07-05 | 1973-01-04 | 1973-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-07-05 | 1977-01-04 | 1977-07-06 | $7700.00 | Window Closed / Lapsed |