US3170273A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for polishing semiconductor materials
Assignee: Monsanto Co
•
Filing: 1963-01-10
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Granted: 1965-02-23
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Expires: 1983-01-10
Abstract
No abstract record available.
Inventors
- 👤 Robert J Walsh
- 👤 Arno H Herzog
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:36
CPC Classifications
H; H10; H10P; H10P52/00; H10P52/40; H10P52/402; H10P50/00
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
46 words
A PROCESS FOR POLISHING SEMICONDUCTOR MATERIALS HAVING A HARDNESS ON THE MOH''S SCALE OF HARDNESS FROM ABOUT 2 TO ABOUT 7, TO A HIGH DEGREE OF SURFACE PERFECTION COMPRISING POLISHING SAID MATERIALS WITH A SUBSTANCE SELECTED FROM THE GROUP CONSISTING OF SILICA SOLS AND SILICA GELS.
References Cited (Backward Citations)
US2445901A
Cited
US2649388A
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US2628896A
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US2744001A
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US2694004A
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US3029160A
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US2914413A
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US3081586A
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US3071455A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-02-23 | 1968-08-24 | 1969-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-02-23 | 1972-08-24 | 1973-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-02-23 | 1976-08-24 | 1977-02-23 | $7700.00 | Window Closed / Lapsed |