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US3110620A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of making plural layer thin film devices

Assignee: International Business Machines Corp
•
Filing: 1960-06-28
•
Granted: 1963-11-12
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Expires: 1980-06-28
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Abstract

No abstract record available.

Inventors

  • 👤 Bruce I Bertelsen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 04:40
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3615; C03C17/3639; C03C17/3642; C03C17/3655; C23; C23C; C23C14/00; C23C14/02; C23C14/024; C23C14/025; C23C14/22; C23C14/24; H; H01; H01B; H01B1/00

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 239 words
A METHOD OF APPLYING A THIN FILM ON A SUBSTRATE BY VAPORIZATION TECHNIQUES COMPRISING THE STEPS OF ARRANGING SAID SUBSTRATE AT FIRST AND SECOND POSITIONS TO RECEIVE VAPORIZED MATERIALS; POSITIONING A MELT OF ALUMINUM AND GOLD TO PROVIDE VAPORIZED MATERIAL TO SAID SUBSTRATE WHILE SAID SUBSTRATE IS AT ITS FIRST POSITION; PLACING A FIRST THICKNESS OF PIECES OF TUNGSTEN INTO A CONTAINER, PLACING A THICKNESS OF SILICON MONOXIDE ON SAID FIRST THICKNESS OF TUNGSTEN, AND PLACING A THICKNESS OF PIECES OF TUNGSTEN ON SAID SILICON MONOXIDE; POSITIONING SAID CONTAINER TO PROVIDE VAPORIZED MATERIAL TO SAID SUBSTRATE WHILE SAID SUBSTRATE IS AT ITS SECOND POSITION; PLACING A SOURCE OF ALUMINUM TO PROVIDE VAPORIZED MATERIAL MATERIAL WHILE SAID SUBSTRATE IS AT ITS SECOND POSITION; APPLYING INCREASINGLY HIGHER HEAT TO FRACTIONALLY VAPORIZE SAID MELT TO INITIALLY DEPOSIT A FIRST LAYER OF ALUMINUM AND THEN A FIRST LAYER OF GOLD ON SAID SUBSTRATE, MOVING SAID SUBSTRATE TO SAID SECOND POSITION, APPLYING INCREASINGLY HIGHER HEAT TO SAID MELT OF ALUMINUM AND TO SAID CONTAINER TO FRACTIONALLY VAPORIZE SAID ALUMINUM AND THEN SAID SILICON MONOXIDE TO THEREBY COAT SAID FIRST LAYER OF GOLD WITH ALUMINUM AND NEXT COAT SAID ALUMINUM WITH A LAYER OF SILICON MONOXIDE, MOVING SAID SUBSTRATE BACK TO SAID FIRST POSITION, AND APPLYING A SECOND LAYER OF GOLD ON SAID SUBSTRATE WHEREBY GOOD ADHESION OF THE VARIOUS LAYERS IS OBTAINED AND WHEREBY HIGH INSULATION BETWEEN THE LAYERS OF GOLD IS ALSO OBTAINED.
Claim 2
Independent Claim 239 words
A METHOD OF APPLYING A THIN FILM ON A SUBSTRATE BY VAPORIZATION TECHNIQUES COMPRISING THE STEPS OF ARRANGING SAID SUBSTRATE AT FIRST AND SECOND POSITIONS TO RECEIVE VAPORIZED MATERIALS; POSITIONING A MELT OF ALUMINUM AND GOLD TO PROVIDE VAPORIZED MATERIAL TO SAID SUBSTRATE WHILE SAID SUBSTRATE IS AT ITS FIRST POSITION; PLACING A FIRST THICKNESS OF PIECES OF TUNGSTEN INTO A CONTAINER, PLACING A THICKNESS OF SILICON MONOXIDE ON SAID FIRST THICKNESS OF TUNGSTEN, AND PLACING A THICKNESS OF PIECES OF TUNGSTEN ON SAID SILICON MONOXIDE; POSITIONING SAID CONTAINER TO PROVIDE VAPORIZED MATERIAL TO SAID SUBSTRATE WHILE SAID SUBSTRATE IS AT ITS SECOND POSITION; PLACING A SOURCE OF ALUMINUM TO PROVIDE VAPORIZED MATERIAL MATERIAL WHILE SAID SUBSTRATE IS AT ITS SECOND POSITION; APPLYING INCREASINGLY HIGHER HEAT TO FRACTIONALLY VAPORIZE SAID MELT TO INITIALLY DEPOSIT A FIRST LAYER OF ALUMINUM AND THEN A FIRST LAYER OF GOLD ON SAID SUBSTRATE, MOVING SAID SUBSTRATE TO SAID SECOND POSITION, APPLYING INCREASINGLY HIGHER HEAT TO SAID MELT OF ALUMINUM AND TO SAID CONTAINER TO FRACTIONALLY VAPORIZE SAID ALUMINUM AND THEN SAID SILICON MONOXIDE TO THEREBY COAT SAID FIRST LAYER OF GOLD WITH ALUMINUM AND NEXT COAT SAID ALUMINUM WITH A LAYER OF SILICON MONOXIDE, MOVING SAID SUBSTRATE BACK TO SAID FIRST POSITION, AND APPLYING A SECOND LAYER OF GOLD ON SAID SUBSTRATE WHEREBY GOOD ADHESION OF THE VARIOUS LAYERS IS OBTAINED AND WHEREBY HIGH INSULATION BETWEEN THE LAYERS OF GOLD IS ALSO OBTAINED.

References Cited (Backward Citations)

US2740928A Cited
US2584660A Cited
GB722866A Cited
US2724663A Cited
US2842463A Cited
US2783164A Cited
US2852416A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1966-11-11 1967-05-13 1967-11-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1970-11-11 1971-05-13 1971-11-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1974-11-11 1975-05-13 1975-11-12 $7700.00 Window Closed / Lapsed

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