Image correcting device for scanning type electron microscope

Abstract

Abstract PURPOSE:To form a highly precise image oscillation distortion correcting device capable of estimating the oscillation regardless of the size of the amplitude of the scanning oscillation by utilizing the property not depending on the oscillation amplitude of the two-dimensional alignment of the correlation values as a basis when estimating the scanning oscillation in the scan vertical direction based on the correlation information of an image scanning line piece. CONSTITUTION:Mutual correlation values determined over multiple lines using an image line piece, i.e., two-dimensional alignment data determined by the line number and the distance between lines, are sorted for each line number, individual data are weighted by the function of the distance between lines to determine the addition value, and the scanning oscillation in the scan vertical direction is estimated from the addition value. The data constituting the correlation value pattern are sorted for each line number, the addition value with the plus or minus symbol of the relative line number for individual data reflects the phase of the oscillation. This addition value can also reflect the amplitude information of the oscillation. The oscillation with any magnitude can be thereby estimated and corrected precisely.

Inventors

• 👤 Akira Kagami
• 👤 Koichi Honma
• 👤 Fuminobu Furumura
• 👤 Hisahiro Furuya

Bibliographic Details