Electrostatic actuator

Abstract

Abstract PURPOSE:To reduce an applied voltage by forming the electrodes of a substrate and the like through patterning and by using a dielectric material as a rotor. CONSTITUTION:An electrostatic actuator is composed of a rotor 1 made of a dielectric material, and upper and lower plates 5, 6 of a stator. Conductive layers 1a are disposed radially at a predetermined interval from the axis of a rotational shaft 2 on the surface of the rotor 1 at the side of the plate 6, and the layers 1a are composed by forming the layer as a thin film on the surface at the side of the stator, and then shaping it by a photolithographic technique in a predetermined pattern. A substrate 4 is laminated on the opposed surfaces of the rotor 1 of the upper surface of the plate 6, and an electrode pattern 3 is further disposed. The electrode is formed by radially depositing it with respect to the axis of the shaft 2 of the rotor 1. Thus, voltages are sequentially applied to the electrodes, an electric field generated by the electrodes is moved to rotate the moving element by the electrostatic action with the element.

Inventors

• 👤 Hiroshi Yoneda
• 👤 弘 米田
• 👤 Yasuhiko Ishiwatari
• 👤 恭彦 石渡
• 👤 Satoshi Yuasa
• 👤 聡 湯浅
• 👤 Masato Niibe
• 👤 正人 新部
• 👤 Tomoji Komata
• 👤 小俣　智司
• 👤 Tetsuya Yano
• 👤 哲哉 矢野
• 👤 Nobuo Watanabe
• 👤 信男 渡辺
• 👤 Hiroyasu Nose
• 👤 博康 能瀬
• 👤 Eigo Kawakami
• 👤 英悟 川上

Bibliographic Details