JPS59197567A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
sputtering equipment
Assignee: Fujitsu General Ltd
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Filing: 1983-04-19
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Granted: —
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Expires: 2003-04-19
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Eiichiro Imaoka
- 👤 今岡 英一郎
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-23 06:30
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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