Coupling structure of optical semiconductor device and optical waveguide and its coupling method

Abstract

Abstract Translated from Japanese (57)【要約】 【目的】光半導体素子と光導波路の結合を無調整で高精 度に、かつ量産性よく行うことを目的とする。 【構成】本発明の光半導体素子と光導波路の結合構造 は、光半導体素子が実装された第１の基板に溝を形成 し、この溝に短尺光ファイバを光半導体素子の発光部の 高さに一致するように配置する。一方、光導波路が形成 された第２の基板の光導波路の延長線上に溝を形成し、 この溝に第１の基板に配置された短尺光ファイバの上半 分をはめ込み、短尺光ファイバと光導波路の結合を行 う。また、光半導体素子の第１の基板への位置決めは、 光半導体素子の実装面と第１の基板表面に赤外線を遮断 する薄膜からなるマークを設ける。赤外線を照射し、マ ークの面積重心を画像処理により算出し、両者が一致す るように光半導体素子を位置調整する。 【効果】光半導体素子を簡便に、しかも高精度に光導波 路に結合させることができる。 (57) [Abstract] [Purpose] The objective is to perform coupling between an optical semiconductor element and an optical waveguide without adjustment, with high accuracy, and with good mass productivity. According to the coupling structure of an optical semiconductor element and an optical waveguide of the present invention, a groove is formed in a first substrate on which an optical semiconductor element is mounted, and a short optical fiber is provided in this groove at a height of a light emitting portion of the optical semiconductor element. Place it to match. On the other hand, a groove is formed on the extension line of the optical waveguide of the second substrate on which the optical waveguide is formed, The upper half of the short optical fiber arranged on the first substrate is fitted into this groove to couple the short optical fiber and the optical waveguide. Further, the positioning of the optical semiconductor element on the first substrate is Marks made of a thin film that blocks infrared rays are provided on the mounting surface of the optical semiconductor element and the surface of the first substrate. Infrared rays are irradiated, the area center of gravity of the mark is calculated by image processing, and the position of the optical semiconductor element is adjusted so that the marks coincide with each other. [Effect] The optical semiconductor element can be easily and accurately coupled to the optical waveguide.

Inventors

• 👤 Kazuhiko Kurata
• 👤 和彦 蔵田

Bibliographic Details