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EP0098067A2
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Method for producing multilayered glass-ceramic structure with copper-based conductors therein
Assignee: Fujitsu Ltd
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Filing: 1983-06-09
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Granted: —
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Expires: 2003-06-09
Abstract
Abstract A method for producing a multilayered glass-ceramic structure with copper-based conductors therein, comprising firing in two stages a multilayered structure in which copper-based patterns and glass-ceramic layers are alternately laminated. The first firing stage is conducted in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere, and at a temperature at which a thermally depolymerizable resin binder contained in the glass-ceramic green sheets is depolymerized and eliminated, but its glass components and copper exhibit substantially no change in their state. The temperature is raised for the second stage which is conducted in an inert atmosphere without water vapor, and at a temperature at which particles of the glass components coalesce, but the metallic state of copper is not affected.
Inventors
- 👤 Nobuo Kamehara
- 👤 Kazuaki Fujitsu Daini Kurihara
- 👤 Koichi Niwa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-23 19:26
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/16; H05K3/12; H05K3/1283; H05K3/1291; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/60; H10W70/62; H10W70/66; H10W70/666; H10W70/67; H10W70/69; H10W70/692; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2203/00; H05K2203/08; H05K2203/088; H05K2203/14; H05K2203/1476; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
155 words
A method of producing a multilayered glass-ceramic structure with copper-based conductors therein, comprising firing an initial multilayered structure in which patterns of copper-based paste and ceramic layers are laminated alternately, at least those ceramic layers that are located between the patterns of copper-based paste being glass-ceramic green sheets which contain a thermally depolymerizable resin as a binder characterised in that the firing is conducted in first and second stages and the first stage is conducted in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere, and at a temperature at which the binder is depolymerized and eliminated but the glass-ceramic components and the copper exhibit substantially no change in their state, and the second stage is conducted in an inert atmosphere without water vapor at a higher firing temperature at which particles of the glass-ceramic components coalesce but the metallic state of the copper is not affected.
Claim 2
Independent Claim
155 words
A method of producing a multilayered glass-ceramic structure with copper-based conductors therein, comprising firing an initial multilayered structure in which patterns of copper-based paste and ceramic layers are laminated alternately, at least those ceramic layers that are located between the patterns of copper-based paste being glass-ceramic green sheets which contain a thermally depolymerizable resin as a binder characterised in that the firing is conducted in first and second stages and the first stage is conducted in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere, and at a temperature at which the binder is depolymerized and eliminated but the glass-ceramic components and the copper exhibit substantially no change in their state, and the second stage is conducted in an inert atmosphere without water vapor at a higher firing temperature at which particles of the glass-ceramic components coalesce but the metallic state of the copper is not affected.
Claim 3
Dependent Claim
21 words
A method according to claim 1 characterised in that the temperature in the first firing stage is from 550°C to 650°C.
Claim 4
Dependent Claim
29 words
A method according to claim 1 or claim 2 characterised in that the inert gas in the first and second firing stages is selected from nitrogen, argon, and helium.
Claim 5
Independent Claim
34 words
A method according to any preceding claim, characterised in that the glass-ceramic green sheets in the initial structure contain from 40% to 60% by weight of alumina based on the weight of the glass-ceramic.
Claim 6
Independent Claim
23 words
A method according to any preceding claim characterised in that the thermally depolymerizable resin is selectedfrom polymethyl methacrylate, polytetrafluoroethylene, poly-a-methylstyrene, and mixtures thereof.
Claim 7
Independent Claim
39 words
A method according to any preceding claim characterised in that the initial multilayered structure is formed by laminating a plurality of composite layers each of which is produced by printing patterns of copper-based conductors on a glass-ceramic green sheet.
Claim 8
Dependent Claim
23 words
A method according to claim 6 characterised in that a row of minute copper balls is fired through each sheet to form via-holes.
Claim 9
Dependent Claim
28 words
A method according to claim 6 or claim 7 characterised in that each green sheet contains 5 to 16%, by weight of the green sheet, of the resin.
Claim 10
Independent Claim
49 words
A method according to any of claims 1 to 5 characterised in that the multilayered structure is formed by alternately printing the patterns of copper-based paste and the glass-ceramic green sheets on a sintered ceramic substrate, the layer of the glass-ceramic green sheets having openings to form via-holes therethrough.
References Cited (Backward Citations)
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