Patent US3537072A successfully refreshed from Google Patents.
DE1110342B
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DE
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Method for material processing by means of a charge carrier beam
Assignee: Carl Zeiss SMT GmbH
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Filing: 1960-06-01
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Granted: —
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Expires: 1980-06-01
Abstract
No abstract record available.
Inventors
- 👤 Dr Justus Sienknecht
- 👤 Dipl-Ing Fritz Schleich
- 👤 Dipl-Phys Karl Hei Steigerwald
Bibliographic Details
Application Number
—
Jurisdiction
DE
Data Source
google_patents
Last Synchronized
2026-10-22 20:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; B; B23; B23K; B23K15/00; B23K15/0013; B23K15/08; B23K17/00; Y; Y10; Y10T; Y10T409/00; Y10T409/30; Y10T409/30084; Y10T409/300896; Y10T409/30112; Y10T82/00; Y10T82/10
Claims Analysis
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References Cited (Backward Citations)
DE1053691B
Cited
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